Vacuum Pump Inlet Trap
Published on : Saturday 05-11-2022
For semiconductor deposition processes, ideal for processes that generate large volumes of solid byproducts, organic solvents, and other contaminants.
A line of vacuum pump inlet traps that are designed to protect vacuum pumps in semiconductor deposition processes has been introduced by Mass-Vac, Inc. of North Billerica, Massachusetts, USA.
MV MultiTrap® Vacuum Inlet Traps feature 304 stainless steel construction with a knock-down stage and two additional stages of user-selectable filter elements for protecting vacuum pumps from ALD, LPCVD, PECVD, and similar processes that produce a lot of heavy byproducts. Capable of accumulating up to 2,500 in3 (41,000 cm3) of solids, depending upon the process, these traps extend the life of the pumps.
Available in 12" and 16" dia. models which use two stages of six filters and two stages of eight, respectively, MV MultiTrap® Vacuum Inlet Traps can be supplied with stainless steel gauze, copper gauze, molecular sieve, and 2-, 5-, and 20-micron polypropylene, and polyester filter elements. These traps are ideal for processes that generate large volumes of solid byproducts, organic solvents, and other contaminants.
MV MultiTrap® Vacuum Inlet Traps are priced from (US) $2,175.00 to $4,795.00 each; with filters priced separately.
Mass-Vac Inc., USA. Email: email@example.com