Linear Z-Axis Stage Driven by an Amplified Piezo Motor
Published on : Monday 30-11--0001
Features
Long, Piezo-Driven Travel Range
- 1100 µm When in Open Loop
- 800 µm When in Closed Loop
Paired, High-Precision Controller and Capacitive Feedback Sensors Provide High-Resolution Positioning
- 2 nm Resolution in Open Loop
- 6 nm Resolution in Closed Loop
Standalone Kinesis® and APT™ Interfaces, ThorImage®LS Integration, and Control via External Voltage
Optional Accessories Available for Increased Versatility
- Microscope Slide Holder for Sample Positioning and Z-Stack Acquisitions
- Ø7 mm Mirror Mount for Use in Laser Cavities, Interferometers, or Spectrometers
- Mounting Plate with 3.0 mm Keyway and 8-32 (M4) and 6-32 (M3) Taps
The LPS710E(/M) is a linear, Z-axis stage driven by a mechanically amplified piezo actuator with integrated capacitive position feedback sensor. It is bundled with a matched, factory-calibrated high-precision piezo controller to maximize positioning accuracy. This design is ideal for applications requiring a long, piezo-controlled travel range with submicron repeatability, nanometer positioning resolution, and fast millisecond response and settling times. This includes laser scanning microscopy, spectroscopy, or interferometry. Additionally, an optional slide holder, mirror mount, and mounting plate are available below to increase the versatility of the stage.
The stage is driven by a discrete piezo stack housed within a hardened steel flexure structure that preloads the piezo stack and amplifies its displacement by a factor of approximately 10. This leads to an overall displacement of 800 µm and 1100 µm when in operated in closed and open loop, respectively, and a maximum load capacity of 300 g (0.66 lbs). Built-in capacitive feedback sensors along with our high-precision piezo controller provide 6 nm resolution in closed-loop operation, enabling active compensation for short- and long-term drifts. When used in open loop, the controller will provide an accurate readout of the stage position with a resolution of 2 nm. An engraved arrow on the side of the unit indicates the direction of travel.
The 21.0 mm x 21.0 mm mounting surface on the top of the stage is equipped with four 4-40 (M3) blind mounting holes that are 4.8 mm deep. They can be used to mount our optional slide holder, fixed optic mount accessories, or mounting plate, all seen below, as well as other 4-40 (M3) equipped components.
The base of the stage includes two slots for 1/4"-20 (M6) cap screws and four slots for 4-40 (M3) cap screws that can be used to secure the stage to an optical table or breadboard. In addition, the stage has two bottom- and side-located 4-40 (M3) mounting holes that can be used to secure the stage using our line of mini-series components, as shown in the image above and to the right.
Each stage is shipped with a piezo controller that has been factory calibrated to the specific stage. Piezo control is supported through the included Kinesis and APT GUIs, our ThorImage®LS image acquisition software, an externally supplied control voltage, or the MZF001 Joystick Console (sold separately below). See the Software & External Control tab for more details. The controller offers USB and RS-232 interfaces for computer control; a BNC input for the addition of sine, sawtooth, and square wave drive signals; a BNC output that gives either positioning feedback from the scanner's built-in capacitive sensors or a signal proportional to the piezo drive voltage; and a connector for the MZF001 joystick. In addition, a DB15 connector provides signals that can be used for synchronization with external equipment.
Key Specificationsa |
||
---|---|---|
Drive Voltage Range (Max) |
-25 V to 150 V |
|
Travel |
Open Loop |
1100 µm ± 10% |
Closed Loop |
800 µm |
|
Resolution |
Open Loop |
2 nm |
Closed Loop |
6 nm |
|
Accuracy |
Closed Loop |
±0.06% (Over Full Travel Range) |
Bidirectional Repeatability |
Closed Loop |
±0.03% (Over Full Travel Range) |
Maximum Loadb |
300 g (0.66 lbs) |
|
Outer Dimensions |
130 mm x 28 mm x 30 mm |
It is used in Electrical Industries.
Thorlabs, Inc.
Tel: 1-973-300-3000
Email: [email protected]