DELTA™ II Flow Ratio Controller
Published on : Monday 30-11--0001
DELTA™ II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution.
It divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability. Send DELTA™ II a gas - or any mixture - and a ratio set point and it will split the gas into two separate output channels automatically and precisely.
Features & Benefits:
- Embedded Ethernet for device monitoring during operation
- Uses standard web browser - no special software required.
- Patented control algorithm for faster response-to-ratio set point
- Wider dynamic control range for ratio control down to 5% of flow channel Full Scale flow
- Bright LED display for easy viewing of flow ratio, temperature and Ethernet address
Applications:
DELTA™ II mass flow ratio controller is used in a variety of flow splitting applications such as etch, strip, and CVD.
It is used in Oil And Gas industries.
MKS Instruments, Inc. Email: [email protected]